Bravo1,
Smallest drill size I have touched off was an #87 (.010), but, as you say your going down approx. 1/2 of a #97 (.006").
Hmm...... 0.1mm is just a human hair in diameter at .004" so understand your concern.
Curious, what are you drilling and what federate and rpm are you using?
Are you using cnc to peck drill with that size?
Use Mascot drills?
RICH